Zeiss expands German site that caps ASML's EUV scanner output — first new building opens four years after Oberkochen site groundbreaking
Zeiss Semiconductor Manufacturing Technology is expanding its Oberkochen, Germany facility by adding approximately 25,000 square meters of production space, with the first building now operational four years after the 2022 groundbreaking. This expansion is critical because Oberkochen and Wetzlar are the only locations worldwide capable of producing the optical columns for ASML's EUV lithography scanners, and ASML's annual report states that its system output is limited by Zeiss SMT's production capacity. ASML plans to increase Low-NA EUV output by roughly 30% in 2027, and its CFO noted the company is compressing build cycles from 22 to 15-16 weeks. The article also details the complexity of High-NA optics (over 40,000 parts, 12 tons), significant financial ties between ASML and Zeiss (€4.41 billion in purchases in 2025, €1.91 billion in loans receivable), and Zeiss SMT's broader expansion including a multifunction factory in Wetzlar and an innovation center in Korea.
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