Zeiss Expands German Site Critical to ASML's EUV Scanner Production
Zeiss Semiconductor Manufacturing Technology is adding approximately 25,000 square meters of production space at its Oberkochen site in southern Germany, with the first building now operational four years after the 2022 groundbreaking. The site, along with Wetzlar, is the only place globally where optical columns for ASML's EUV lithography scanners can be built. ASML's annual report states that its system output is limited by Zeiss SMT's production capacity. ASML plans to increase Low-NA EUV output by roughly 30% in 2027 and is compressing its scanner build cycle. Zeiss SMT's purchases from ASML reached €4.41 billion in 2025, up from €3.95 billion in 2024. The article also details the complexity of High-NA optics, which contain over 40,000 parts and weigh 12 tons, and notes ASML's significant financial support to Zeiss through loans and advance payments.
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